ZYGO ZMI-4004 4S019-765 Measuring plate

ZYGO ZMI-4004 4S019-765 Measuring plate

The VME64x is a 4-axis measurement board designed for high-end industry and scientific research. With its 0.15nm resolution, 2.55m/s high-speed tracking, and complete error compensation, it can provide reliable nanometer-level displacement measurement solutions in key fields such as semiconductors, optics, and precision metrology.

YGO ZMI‑4004 (Part Number 4S019‑765) Product Overview

• Product Positioning
  The ZMI‑4004 is a 4‑axis VME64x measurement board offered by Zygo (now part of AMETEK’s ultra‑precision technology division). It is designed for high‑precision displacement/distance measurement and is widely used in semiconductor lithography, optical fabrication, metrology, aerospace, and high‑precision motion control applications.
• Core Technology and Specifications
  • Resolution: Dual‑channel (2‑pass) up to 0.15 nm, single‑channel (1‑pass) about 0.31 nm.
  • Measurement Speed: Up to 2.55 m/s (2‑pass); single‑channel 5.1 m/s.
  • Data Rate: 10 MHz, data age uncertainty ±0.1 ns.
  • Axes: Each board supports synchronized measurement on 4 axes, suitable for multi‑axis systems.
  • Electronics Form Factor: 6U VME 64x, providing both parallel VME and high‑speed serial data interfaces.
  • Laser Source: Paired with Zygo 7712 laser head, output power >1.35 mW, wavelength stability 0.5 ppb (1 h).
• Modularity and Compatibility
  • Modular design allows installation in VME chassis and supports expansion up to 64 measurement axes.
  • Seamlessly compatible with other Zygo DMI (Displacement Measuring Interferometer) components such as interferometers and fiber‑coupled modules, facilitating the construction of complete displacement‑measurement systems.
• Key Functions
  1. Sub‑nanometer Displacement Measurement: Achieves nanometer‑level or sub‑nanometer resolution to meet the most demanding positioning requirements.
  2. High‑Speed Tracking: Maintains high accuracy on fast‑moving platforms, increasing production line throughput.
  3. Error Compensation: Built‑in cyclic error reduction options automatically mitigate inherent DMI non‑linearity, enhancing measurement accuracy.
  4. Reliability: Utilizes high‑quality electronic components suitable for harsh industrial environments, with a service life exceeding 50,000 h.
• Typical Application Scenarios
  • Semiconductor Lithography: Used for wafer positioning and overlay calibration, improving overlay precision.
  • Optical Component Fabrication: Real‑time monitoring of machining displacement to keep errors within the nanometer range.
  • High‑Precision Motion Platforms: Works with servo systems to achieve precise positioning and high‑speed scanning.
  • Research Laboratories: Provides a reliable displacement reference for precision measurement experiments.
• Product Model Correspondence
  • In the domestic market, the corresponding part number is often listed as 8020‑0500‑01 (the ZMI‑4004 measurement board).
  • This part number is also identified in some supply chains as 4S019‑765, used for procurement and spare‑part management.

Sales of the brand:

ABB、EPRO、GE、FOXBORO、Schneider、Rexroth、Honeywell、Bently、YASKAWA other global DCS system and PLC system, servo system of famous industrial brand.

☀️Tara(Sales Director)

📞Tel: + 86-13806028623

📮Whatsapp:+86-13806028623

💬Email: ydf8801@163.com

🏚️Ship to you via DHL/TNT/UPS/EMS/Fedex

🥇Product Condition: One-year warranty

requently Asked Questions:
1. How long does it take to receive the goods?
We have stock in stock and can accept same-day payment and delivery!

2. What payment methods do you accept?
There are many methods (T/T…) for you to choose from, and you can choose whatever you want.

3. Is there after-sales service?
Of course, if our products are brand new, they have a one-year warranty!

4. What courier services do you accept? We offer SF Express, DHL, and other international express delivery options.

5. How can I contact you?

You can contact me 24/7 via WeChat, Skype, WhatsApp, LINE, and my email!

Company Profile

Xingchuang Ronghe (Fuzhou) Electric Co., Ltd. is a company specializing in the sales and technical services of spare parts for the world’s top industrial automation systems. With our profound industry experience and stable supply channels, we provide domestic and foreign customers with original, authentic, complete models, and fast-delivered precision spare parts solutions. We are your reliable partner in ensuring production continuity and stability.

We specialize in distributing the following core brands and product lines:

ABB

•  Process Control: ABB DCS process control system full range of components.
• ABB FreeLance AC800F power modules: SA801F/SA811F/SD802F/SD812F, EI811F/ABB EI812F/ABB EI813F, etc.
• ABB S800 analog I/O modules: AI801/AI810/AI825/AO801/AO845/AO895
• ABB S800 digital I/O modules: DI801/DI810/DO801/DO810

Bently Nevada
3500 Module Mainboards: 3500/42, 3500/45, 3500/40, 3500/50, etc.
(CPU Modules): 3200/32, 3500/25
3500 Module Minimum Cards: 128229-01, 128229-01, 133442-01, 125800-01, 167699-02, etc.
Extension Cables: 330850-50-05 (for preamplifier), 330730-040-00-00, 330103-00-06-10-02-00, etc.

EPRO

•  MMS6000 TSI System: MMS6110/MMS6210/MMS6220 series monitoring modules.
  Sensors: Proximitor sensors CON011, CON021, CON031, etc

GE

• PLC Systems: IC693, IC695, and IC697 Series Modules.
• Drives and Protection: GE DRIVE SYSTEMS Series Inverters, SR Integrated Protection Frame Series.

Rexroth

• Drives and Motors: Full range of Rexroth servo drives and controllers; models include: servo motor 2AD160B-B0350R2-BS03-D2V1, MSK040C-0600-NN-M1-UP1-NSNN, etc.
• Rexroth communication boards and amplifier boards: MTS-P01.2-D2-B1-E1-NN-NN-FWEP, VT-VPCD-1-1X/V0/1-0-1, VT5006-17B, etc.

Siemens

· Process Instruments and Controllers: Siemens MOORE series, common models include: QLCDM024DCBAN, 39ACM24BEN, 39AC12T4V1, 16114-171, etc.
· Automation Systems: Full range of SIMATIC S5 PLCs, SIMATIC S7-400 CPU modules and expansion modules, Simatic C7 systems, and various Siemens touch screens.