ZYGO ZMI-2002 8020-0211

This is a high-precision, dual-beam laser interferometer manufactured by ZYGO (now a subsidiary of AMETEK). It is primarily used for accurately measuring linear position, velocity, and angle, and is a key device in precision manufacturing, metrology, and scientific research.

Product Overview

• Product Name: ZMI-2002 Laser Interferometer System

• Model/Part Number: ZMI-2002 8020-0211

• Manufacturer: ZYGO Corporation (now a subsidiary of AMETEK)

• Technology: Dual-Beam, Heterodyne Interferometry

• Core Function: High-precision linear position, velocity, and angle measurement.

Key Features & Advantages

1. Dual-Beam Design:

   • This is the core feature of the ZMI-2000 series. It allows the system to use a single laser head to simultaneously measure two degrees of freedom (e.g., X-axis displacement and Y-axis yaw, or X-axis displacement and pitch in the vertical axis).

   • Greatly simplifies measurement setup, improves efficiency, and directly reveals angular errors in axis motion.

2. High Accuracy and Resolution:

   • Based on the stable wavelength of a Helium-Neon laser, it provides exceptional measurement accuracy, typically on the order of ±0.5 ppm (parts per million) or better.

   • Electronic interpolation enables sub-nanometer resolution.

3. Environmental Compensation:

   • Features built-in or external environmental sensors (for air temperature, pressure, and humidity) to automatically compensate for the effects of air refractive index on laser wavelength, ensuring accuracy in non-standard conditions.

4. High Speed and Dynamic Measurement:

   • Capable of measuring high-speed axes and providing velocity and acceleration data. The ZMI-2002’s electronics are designed to handle rapidly changing signals.

5. Versatility:

   • By using different optical optics (such as linear, angular, flatness, or straightness optics), it can perform measurements for various geometric parameters.

   • The specific part number 8020-0211 typically refers to a complete system kit, likely including the laser head, linear optics, reflector, environmental sensor, cables, and mounting hardware.

6. User-Friendly:

   • Accompanied by dedicated software (such as ZYGO’s MetroPro® or specific ZMI software) that provides intuitive data acquisition, analysis, and reporting capabilities.

Typical Applications

The ZMI-2002 system is widely used in fields requiring extremely high-precision motion control:

• Semiconductor Manufacturing: Calibration and performance verification of lithography scanners and wafer inspection tools.

• Precision Machine Tools: Calibration of CNC machine tools, CMMs, and ultra-precision lathes for linear positioning accuracy, repeatability, and geometric error measurement and compensation.

• Metrology Labs: Serving as a length standard for calibrating other measurement instruments.

• Aerospace and Defense: Precision alignment and measurement for inertial navigation systems, telescopes, and antenna systems.

• Research Institutions: Precision displacement measurement in nanotechnology, physics experiments, and other cutting-edge research fields.

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Sales of the brand:

ABB、EPRO、GE、FOXBORO、Schneider、Rexroth、Honeywell、Bently、YASKAWA other global DCS system and PLC system, servo system of famous industrial brand.

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